Lab system

Parylene lab coating system

Our Parylene lab coating system offers users a range of standard feature and options that will meet all needs.

The standard small scale Parylene system provides a practical set up developed from years of experience.

These systems are currently being used in our coating services and have been proven to be highly cost-effective at producing quality Parylene coating. 

Download: Parylene lab coating system technical specification

Machine parameters

  • Chamber configuration: Standard chamber is electro-polished stainless steel.
  • Optional Configuration: Aluminum is available upon request
  • Nominal Chamber Size: 12” dia. x 12” H (30.5 cm diameter, 30.5 cm H)
  • Effective/Usable Space: 8.75” dia. x 11.188” H (22.2 cm diameter, 28.4 cm H)

Note: The chamber is not coated in standard configuration as it is constructed of electro-polished stainless steel. A micro-soap is utilized to prevent adhesion of Parylene to the chamber surfaces.

Pyrolysis tube
  • Standard: quartz material
  • Alternative in stainless steel
  • Mechanical refrigerated probe type Colt trap system, -100°C
Vacuum pump
  • Standard configuration is an Edwards model RV8 (an equivalent model may be utilized/substituted in lieu of).
  • Optional motors are available.
  • Polished 304 stainless steel flute baffle is standard, additional options are available.
  • Options vary with chamber size and configuration, call for model specific options.

Electrical parameters

Electrical controls
  • The unit is automated and controlled by a PLC in standard configuration.
Electrical configuration
  • Single phase 100-125 Vac (110)
  • Single phase 200 Vac
  • Single phase 208-240 Vac (220)
  • 2-phase 100-125/200-240
  • Field selectable / switchable: 100-125 Vac, 208-240Vac, 100-125/200-240Vac (110, 220, 110/220)
  • The unit is available in 3-phase arrangement upon request (special order, please call for pricing)

Option: Vapor Phase Silane (VPS)

  • Vapor Phase Silane adhesion promotion is an option.
  • All units are prepared for the feature that is factory or field installable and offered as an upgrade to existing lab coaters.
  • Additionally the VPS system is of quick change out design allowing for fast turn around and online or off-line maintenance flexibility.
  • Price on application.

Interchangeable chambers

  • Interchangeable chambers are a standard configuration with all chamber options.
  • They can be swapped with like size chambers, and some models, including the standard configuration allow for swapping of various chamber sizes.

Additional chambers

  • Additional chambers can be ordered with any system.
  • Larger chamber sizes are available upon request:
  • 15” x 15” nominal chamber size [Note: Requires Base Plate Upgrade]
  • 18” x 18” nominal chamber size [Note: Requires Base Plate Upgrade]
  • Smaller chambers are available as options.
  • Price on application.

System parameters

  • Combined system foot print: 24” L x 36” W x ~52” H (61 cm L, 91.5 cm W, 132.1cm)  
  • Parylene deposition system and mechanical chiller combined dimensions as installed
  • Combined system weight: 273 lbs. (124.1 kg)

Minimum and recommended clearances

  • Rear spacing: 12” minimum / 18” recommended
  • Left side spacing: 6” minimum / 18” recommended
  • Right side spacing: 6” minimum / 18” recommended
  • Front spacing: 36” minimum / ≥ 36” recommended


  • Shipping dimensions (crated / palletized): 42” L x 42” W x 46” H (106.7 cm L x 106.7 cm W x 116.9 cm H)
  • Shipping weight: 600 lbs. (272.75kg)


  • Standard service kit
  • Available for O-rings etc., and additional kits or items can be supplied as needed/required.

Chamber extensions & collars

  • Chamber extensions are available.
  • Extension options vary with configuration/models.

Contact us now to send us your requests.



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